Fig. 5From: Development of SEM and STEM-in-SEM grid holders for EDS analysis and their applications to apatite phasesCorrelation of the O and P intensities for the reference materials obtained at 15 kV and 5 kV using the FE-SEM. Distributions of data points indicate much higher reliability of the FE-SEM with high R2 values, compared to those of the Mini-SEMBack to article page