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Journal of Analytical Science and Technology
Fig. 6 | Journal of Analytical Science and Technology

Fig. 6

From: Microscopic and chemical analysis of room temperature UV laser annealing of solution-based zinc-tin-oxide thin films

Fig. 6

a STEM image of the ZTO thin films on SiO2/Si substrate after excimer laser irradiation. b Low-loss EEL spectrum image across the ZTO thin film along the line scan in a. The ZTO film is composed of two distinctive regions: upper (region A) and lower (region B) region. The region B contains additional plasmon peak at ~ 14 eV. c Low-loss spectrum from region A and region B, respectively. d STEM image of ZTO thin films where EDS line scan was performed. e EDS results: Zn, Sn, and oxygen profiles along the line scan drawn in d

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