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Table 1 Intensity ratios of Ca and O to P at 15 and 5 kV from the Mini-SEM and FE-SEM. (Mean, SD = standard deviation. RSD = relative standard deviation (SD/Mean × 100(%))

From: Development of SEM and STEM-in-SEM grid holders for EDS analysis and their applications to apatite phases

   15 kV Mean SD RSD (%) 5 kV Mean SD RSD (%)
Mini-SEM (W source) SAp Ca/P 1.40 0.04 2.94 Ca/P 0.05 0.02 43.33
O/P 1.17 0.36 31.12 O/P 4.92 0.69 14.03
BAp Ca/P 1.41 0.14 10.00 Ca/P 0.15 0.11 75.44
O/P 0.51 0.29 58.09 O/P 5.98 2.14 35.69
MAp Ca/P 1.43 0.05 3.28 Ca/P 0.03 0.03 75.15
O/P 0.83 0.34 40.78 O/P 4.60 0.79 17.07
FAp Ca/P 1.93 0.61 31.42 Ca/P 0.14 0.10 71.97
O/P 1.07 0.49 46.16 O/P 6.88 3.21 46.67
FE-SEM SAp Ca/P 1.54 0.03 2.10 Ca/P 0.29 0.02 6.79
O/P 1.47 0.20 13.71 O/P 3.48 0.21 6.04
BAp Ca/P 1.46 0.03 1.78 Ca/P 0.29 0.04 14.20
O/P 1.26 0.27 21.35 O/P 3.58 0.45 12.63
MAp Ca/P 1.51 0.03 1.63 Ca/P 0.29 0.02 7.12
O/P 1.10 0.15 13.53 O/P 3.36 0.31 9.34
FAp Ca/P 1.76 0.19 10.83 Ca/P 0.34 0.03 8.59
O/P 1.60 0.23 14.24 O/P 5.58 2.21 39.69