Table 1 Cell growth result table by precursor type
No | Monomer | Carrier gas flow rate (SCCM) | Process pressure (Pa) | Process plasma power (W) | Process time (min) | Cellular growth | |
|---|---|---|---|---|---|---|---|
Monolayered cells | Spheroids (numbers/field) | ||||||
1 | DMCPS | 60 | 73 | 20 | 10 | None | None |
2 | TMSS | 60 | 73 | 20 | 10 | Proliferated | 2.0 |
3 | TMSS | 90 | 73 | 20 | 10 | Proliferated | 2.1 |
4 | OMBTSTS | 60 | 73 | 20 | 10 | Minimally | 2.9 |
5 | OMBTSTS | 90 | 73 | 20 | 10 | Minimally | None |