EDS analysis conditions | |
---|---|
Accelerating voltage | 15Â kV |
Probe current |  < 200 nA |
Specimen thickness | 100Â nm (approximately) |
Specimen tilt | 0 º |
Acquisition area size | 1 um × 1 um (Area acquisition mode) |
Acquisition time | 100Â s |
Number of spectrum acquisitions | 20 times |
Take-off angle of the EDS detector | 35 º |
Detector active area | 60 mm2 |